• Pulse energy up to 800mJ
•Using the design of magnetic assist excitation circuit to extend the life of the thyratron
• Built-in energy feedback system, good energy stability
• Internal trigger/external trigger
Features:
• Pulse energy up to 800mJ
•Using the design of magnetic assist excitation circuit to extend the life of the thyratron
• Built-in energy feedback system, good energy stability
• Internal trigger/external trigger
Application: laser deposition of thin films, fine processing, material surface treatment, laser annealing
Specification:
PLD30/PLD20:1500×450×880mm PLD20L:1600×405×880mm (230kg)
technical parameter | |||||
Medium gas | ArF | KrF | XeCl | Chef | |
Wavelength (nm) | 193 | 248 | 308 | 351 | |
Maximum single pulse energy (mJ) | PLD30 | 200 | 500 | 300 | 200 |
PLD20 | 300 | 650 | 400 | 300 | |
PLD20L | 400 | 800 | 500 | 400 | |
Average power (W) | PLD30 | 5 | 14 | 8 | 5 |
PLD20 | 5 | 12 | 8 | 5 | |
PLD20L | 7 | 14 | 9 | 7 | |
Maximum repetition frequency (Hz) | PLD30 | 30 | |||
PLD20 | 20 | ||||
PLD20L | 20 | ||||
Pulse width (FWHM, ns) | PLD30 | ~25 | |||
PLD20 | |||||
PLD20L | |||||
Spot size (mm) (V*H) | PLD30 | ~24×8 | |||
PLD20 | |||||
PLD20L | |||||
Energy stability (sigma,%) | 1 (Measured at 248nm output) | ||||
Divergence angle (mrad) (V*H) | ~3×1 | ||||
cooling method | Water cooling | ||||
interactive mode | Control system: RS232 (LCD screen/PC) | ||||
External trigger: optical signal |
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